Film Forming Apparatus
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United States of America Patent
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Issued Date -
Dec 6, 2007
app pub date -
Mar 10, 2005
filing date -
Mar 12, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A film forming apparatus which can perform a film forming process to a base material while the base material is being mounted on a die for a molding process. The film forming apparatus is provided with a cylinder-shaped frame body (1h) having one end closed with a bottom part and the other end opened, a target (1a) arranged on an inner plane of the bottom part, and a port (3b) formed to penetrate a wall part of the frame body (1h).
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