Vibration sensor
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United States of America Patent
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Issued Date -
Dec 6, 2007
app pub date -
Jun 6, 2007
filing date -
Jun 6, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A vibration sensor includes a vibration body, a drive circuit that vibrates the vibration body, a sense circuit that refers to a reference signal associated with a drive signal for the drive circuit and detects a physical state of the vibration body on the basis of a sense signal related to vibration of the vibration body, and a capacitor provided between the drive circuit and ground. The capacitor has a temperature characteristic of a capacitance value defined so as to compensate for at least a part of the temperature characteristic of a sensitivity of the sense signal to the vibration of the vibration body.
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