Cmp Slurry Strainer
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United States of America Patent
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Issued Date -
Nov 15, 2007
app pub date -
Sep 24, 2003
filing date -
Sep 24, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A slurry strainer for tungsten CMP. It is made of PVDF and has a lower, plug portion for close fitting into the top of a drain and an upper, convex portion that sits on top of the drain, with a larger diameter than the drain itself. Debris rolls off the top of the strainer, rather than blocking its through-holes. A lip around the edge improves air flow.
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