SPUTTER TARGET OF A SILVER ALLOY, ITS USE AND GLASS SUBSTRATE WITH THERMAL INSULATION LAYER
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app pub date -
Jun 5, 2007
filing date -
Dec 10, 2004
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Abstract
A sputter target is provided having a sputter material made of a silver alloy comprising silver and at least one further element selected from the group of Mg, Ca, Co, Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Th, Dy, Ho, Er, Tm, Yb, and Lu. The at least one further element is present in the alloy in a proportion of >50 at. ppm, respectively, and a total proportion of the group of <5 at. %. The sputter targets may be used to produce a glass substrate having a thermal insulation layer.
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