Pump Unit for Supplying Chemical Liquids
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United States of America Patent
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Issued Date -
Nov 8, 2007
app pub date -
Jul 29, 2005
filing date -
Sep 10, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A pump unit for supplying chemical liquids capable of reducing the trapping of air bubbles and chemical liquids inside the chemical liquid passage of the unit while reducing the size by forming the pump and open/close valves in the vicinity of the pump into a single unit. The pump unit 10 is formed by integrally mounting a suction-side passage member 17 with which a suction-side shutoff valve 13 is assembled together and a discharge-side passage member 18 with which a discharge side shutoff valve 14 is assembled together on the pump 11 (pump housings 21, 22). Suction passages 17a and 21b and discharge passages 18a and 21c communicating with a pump chamber 25 are disposed on the same line L1.
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