APPARATUS FOR THERMOCOUPLE SETTING AND FLAT ZONE PROCEDURE IN A FURNACE
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United States of America Patent
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Issued Date -
Nov 8, 2007
app pub date -
May 5, 2006
filing date -
May 5, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A thermocouple jig for positioning a thermocouple in a wafer fabricating furnace is described. The jig has a bar having predetermined marking corresponding to flat zones in the process tube of the furnace, a rail parallel to the bar, a rod extending substantially perpendicular from the rail adapted to receive and hold a thermocouple, the rod slidable along the rail, and a motor to drive the rod along the rail. The thermocouple mounted onto the rod is moveable along a vertical axis of the furnace to a desired flat zone by driving the rod along the rail to a predetermined mark which corresponds to the flat zone on the bar.
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