Soft magnetic target material
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United States of America Patent
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Issued Date -
Nov 1, 2007
app pub date -
Apr 10, 2007
filing date -
Apr 14, 2006
priority date (Note) -
Abandoned
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Abstract
There is disclosed a soft magnetic target material with an improved atmospheric resistance without deterioration of magnetic properties. A soft magnetic target material according to the first aspect comprises a Fe--Co based alloy having a Fe:Co atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In addition, a soft magnetic target material according to the second aspect comprises a Fe--Ni based alloy having a Fe:Ni atomic ratio of 100:0 to 20:80, wherein the alloy further comprises one or both of Al and Cr of 0.2 to 5 atom %. In the soft magnetic target materials according to the first and second aspects, the alloys further comprise one or more selected from a group consisting of B, Nb, Zr, Ta, Hf, Ti and V of not more than 30 atom %.
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