Surface inspection by scattered light detection using dithered illumination spot
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 25, 2007
app pub date -
Apr 18, 2007
filing date -
Apr 19, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and an acoustic-optic deflector that continuously dithers the light beam transmitted by the light source back and forth, producing a dithered output beam. The apparatus also includes at least one lens that forms a scan line on a disk surface from the dithered output beam with the scan line generating multiple scans and a detector that detects scattered light from defects on the disk surface passing through the dithered output beam of the scan line.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully