Vibration Isolation Table Device
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United States of America Patent
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Issued Date -
Oct 25, 2007
app pub date -
Sep 7, 2005
filing date -
Sep 14, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A vibration isolation table device of the present invention is provided with a top plate directly or indirectly contacting an object to be vibration-isolated, suspending plates suspending from peripheral edges of the top plate, and a base member covered by the top plate and the suspending plates, wherein a perpendicular fluid spring and a fluid bearing are disposed subsequently between an inside surface of the top plate and the base member to be directed from the base member toward the inside surface of the top plate, a horizontal fluid spring is disposed between an inside surface of at least one of the suspending plates and the base member, and after the floating of the top plate and the suspending plates by the perpendicular fluid spring and performing a leveling operation, the top plate is floated in a non-contact state so that friction in the horizontal direction is made substantially zero at very soft condition, and accordingly, soft spring characteristics are provided in the perpendicular and horizontal directions and an improved positioning stability can be obtained.
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