Surface contamination detection

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United States of America Patent

PATENT NO 7397560
APP PUB NO 20070229819A1
SERIAL NO

11397064

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A contamination detector in accordance with one embodiment of the invention includes a plasma generation system operable to direct an atmospheric plasma discharge towards a surface. The contamination detector further includes a light capture system to capture light generated by interaction of the atmospheric plasma discharge with the surface. The light capture system guides the captured light to an optical detection system configured to detect a contaminant.

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Patent Owner(s)

Patent OwnerAddress
AGILENT TECHNOLOGIES INC5301 STEVENS CREEK BLVD SANTA CLARA CA 95051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dutton, David T San Jose, CA 9 111
Seaward, Karen L Palo Alto, CA 25 739

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