Ion Balance Sensor
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United States of America Patent
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Issued Date -
Oct 4, 2007
app pub date -
Jun 1, 2005
filing date -
Jul 5, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
To enable accurate detection of ion balance with a simple configuration, thereby enabling small size and reduction of a manufacturing cost, and detection of the ion balance near the surface of an object to be discharged. An ion balance sensor includes an antenna 20 charged with positive ions or negative ions, and a normally-on type MOSFET 11 in which a gate electrode G is connected to the antenna 20, an ion balance-detecting resistance R is connected between a grounded source electrode S and the gate electrode G, and a DC power source V.sub.DS and a load resistance R.sub.L are serially connected between the source electrode S and a drain electrode D. A voltage of the gate electrode G is changed due to a voltage drop by a current flowing between the charged antenna 20 and an earth via the ion balance-detecting resistance R, and a change of drain current due to the voltage of the gate electrode G is detected, thereby detecting positive and negative balance of ions used for charging the antenna 20.
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