Apparatus and Method for Carrying Substrates
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United States of America Patent
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Issued Date -
Sep 20, 2007
app pub date -
Mar 5, 2007
filing date -
Mar 17, 2006
priority date (Note) -
Abandoned
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Abstract
The present invention provides a method and an apparatus for carrying at least one substrate for plasma processing. The method and apparatus comprising a carrier for transporting the substrate, that is located unbonded on the carrier, onto a substrate support within a plasma system for plasma processing. An electrostatic clamp, that is coupled to the substrate support, electrostatically secures the substrate to the substrate support through the carrier during plasma processing.
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