Method and Apparatus for Dispensing Liquid with Precise Control
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United States of America Patent
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Issued Date -
Sep 20, 2007
app pub date -
Feb 13, 2007
filing date -
Feb 15, 2006
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Abandoned
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Abstract
The present invention provides methods and apparatus combining a pressure vessel and a centrifugal pump to accurately and efficiently control pressure and flow rate of liquid in a liquid dispense system. The present invention particularly relates to the accurate and efficient control of pressure and flow rate of liquids, such as high purity chemicals or slurries used in semiconductor manufacturing processes.
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