MEMS resonator using frequency tuning
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United States of America Patent
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Issued Date -
Sep 20, 2007
app pub date -
Jan 30, 2007
filing date -
Jan 31, 2006
priority date (Note) -
Abandoned
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Abstract
A MEMS sensor having a vibrating cantilevered beam sensing element is provided. The sensor has a drive element which is configured to apply follower forces to a free end of the cantilevered beam. These forces function to change the resonant frequency of the beam.
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