Exposure Apparatus
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United States of America Patent
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Issued Date -
Sep 6, 2007
app pub date -
Jun 16, 2005
filing date -
Jun 17, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In a stage member for use in an exposure apparatus, a honeycomb structural body has walls that are extended in a direction perpendicular to a longitudinal direction of the stage member and that surround square shaped prismatic spaces, so as to accomplish a high resistance and a high resonant frequency with respect to torsional vibration. The honeycomb structural body of the stage member is preferably made of a ceramic material.
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