Flow Rate Control Apparatus
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United States of America Patent
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Issued Date -
Sep 6, 2007
app pub date -
Feb 7, 2007
filing date -
Mar 2, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A flow rate control apparatus includes a base section, wherein the base section is composed of a plurality of stacked metal plates. The flow rate control apparatus further includes a pressure control section, which regulates pressure of a pressure fluid (gas) that flows through a first passage in the base section, a pressure sensor that detects pressure of the pressure fluid flowing through a second passage, and a flow passage-switching section, including first to third orifices, for throttling the fluid pressure-regulated by the pressure control section so as to have a predetermined flow rate, and which has first to third ON/OFF valves for switching fourth to sixth passages for respectively directing the pressure fluid toward a pressure fluid output port.
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