PIEZOELECTRIC THIN FILM DEVICE

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United States of America Patent

APP PUB NO 20070200458A1
SERIAL NO

11675671

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Abstract

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The present invention is directed to improving characteristics of a piezoelectric thin film device. A piezoelectric thin film filter including four film bulk acoustic resonators has a configuration where a filter section and a base substrate are bonded to each other via an adhesive layer, the filter section including a piezoelectric thin film which cannot stand up individually under its own weight, the flat base substrate mechanically supporting the filter section. As a piezoelectric material constructing the piezoelectric thin film, it is desirable to use a single-crystal material including no grain boundary, selected from crystal, lithium niobate, lithium tantalite, lithium tetraborate, zinc oxide, potassium niobate, and langasite.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDNAGOYA-CITY AICHI 467-8530
NGK OPTOCERAMICS CO LTD434-3 AZA GOTANDA OOAZA SHIMOZUE KOMAKI-CITY AICHI-PREFECTURE 485-8557

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamajima, Akira Nagoya-City, JP 19 117
Iwata, Yuichi Nagoya-City, JP 42 189
Suzuki, Kengo Komaki-City, JP 93 530
Yamaguchi, Shoichiro Ichinomiya-City, JP 54 412
Yoshino, Takashi Ama-Gun, JP 121 1040

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