Method and apparatus for manufacturing a functional layer consisting of at least two components
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United States of America Patent
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Issued Date -
Aug 16, 2007
app pub date -
Dec 16, 2004
filing date -
Dec 21, 2003
priority date (Note) -
Abandoned
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Abstract
A method for manufacturing a functional layer includes introducing a substrate into a process chamber; generating a plasma by a DC plasma cascade source; depositing a first deposition material on the substrate under the influence of the plasma. At the same time, a second deposition material is applied to the substrate with a second deposition process. The functional layer has no catalytic function.
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