Method and apparatus for controlling sample position during material removal or addition
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United States of America Patent
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app pub date -
Feb 6, 2006
filing date -
Feb 6, 2006
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Abstract
A method and system includes the accurate positioning of a sample in a multi-axis range of motion. In a preferred embodiment, the present invention enables this movement by combining coarse and fine motion stages. By using a combination of stages and precise measuring means, normal and typical errors are significantly reduced.
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