Epitaxial thin films

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United States of America Patent

APP PUB NO 20070178227A1
SERIAL NO

11452591

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Abstract

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Epitaxial thin films are formed on textured substrates. An electrode is formed on the exposed surface of the thin film; the textured substrate removed, and second electrode is formed on the thin film on the side opposite the first electrode. A capacitor is thereby formed.

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Patent Owner(s)

Patent OwnerAddress
HUNT ANDREW TNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deshpande, Girish Atlanta, GA 8 167
Hunt, Andrew Tye Atlanta, GA 26 503
Hwang, Tzyy-Jiuan Jan Alpharetta, GA 6 115
Lin, Wen-Yi Ellington, CT 81 1412

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