End effector for transferring a wafer
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United States of America Patent
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Issued Date -
Aug 2, 2007
app pub date -
Feb 1, 2006
filing date -
Feb 1, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An end effector for transferring a wafer, a method of re-sitting a wafer in a wafer cassette, and a method of calibrating positioning of an end effector for wafer-pick. The end effector comprises a blade for supporting the wafer during transfer, and at least one engagement element coupled to the blade, the engagement element protruding from the blade for engaging the wafer during insertion of the blade into a wafer cassette for re-sitting of the wafer in the cassette.
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