Process and Apparatus for Silicon Boat, Silicon Tubing and Other Silicon Based Member Fabrication
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United States of America Patent
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app pub date -
Mar 22, 2007
filing date -
Sep 19, 2001
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Abandoned
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Abstract
Process, apparatus, and application of a silicon/silicon alloy/silicon compound, having at least one silicon atom, to a boat, an epitaxial chamber, and tubing and liners, is described. Powder pressing, plasma and non plasma powder deposition, slurry deposition and slurry casting, silicon/silicon alloy casting and directional solidification are among methods useful for forming the devices. The articles have application in the wafer processing industry.
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