Reflective spatial light modulator

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United States of America Patent

SERIAL NO

11726895

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Abstract

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A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

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Patent Owner(s)

Patent OwnerAddress
MIRADIA INCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Dongmin Belmont, CA 58 619
Pan, Shaoher X San Jose, CA 89 2680
Yang, Xiao Sunnyvale, CA 235 1943
Zhang, Shoucheng Stanford, CA 10 199

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  • 2 Citation Count
  • G02B Class
  • 2.11 % this patent is cited more than
  • 18 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges2961730918988372421141352601 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050100150200250300350400450500550600650

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