Reflective spatial light modulator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
N/A
app pub date -
Mar 23, 2007
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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MIRADIA INC | CALIFORNIA USA CALIFORNIA |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Chen, Dongmin | Belmont, CA | 58 | 619 |
# of filed Patents : 58 Total Citations : 619 | |||
Pan, Shaoher X | San Jose, CA | 89 | 2680 |
# of filed Patents : 89 Total Citations : 2680 | |||
Yang, Xiao | Sunnyvale, CA | 235 | 1943 |
# of filed Patents : 235 Total Citations : 1943 | |||
Zhang, Shoucheng | Stanford, CA | 10 | 199 |
# of filed Patents : 10 Total Citations : 199 |
Cited Art Landscape
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Patent Citation Ranking
- 2 Citation Count
- G02B Class
- 2.11 % this patent is cited more than
- 18 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Dec 12, 2017 | I | Issuance | |
Dec 12, 2017 | PD | Priority Date | |
Nov 21, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Aug 31, 2017 | P | Published | |
Apr 25, 2017 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SATTLER, MICHAEL;POPOWICZ, GRZEGORZ;DAWIDOWSKI, MACIEJ;AND OTHERS;SIGNING DATES FROM 20170328 TO 20170412;REEL/FRAME:042134/0356 Owner name: HELMHOLTZ ZENTRUM MUNCHEN - DEUTSCHES FORSCHUNGSZE |
Sep 08, 2015 | F | Filing |

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