Assembly and method for delivering a reactant material onto a substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20070166459A1
SERIAL NO

11361950

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An assembly and method for delivering a reactant material onto a substrate is described and which includes a delivery member which has a first surface, and an opposite second surface, and wherein the second surface is positioned adjacent to a substrate, and wherein an elongated substantially continuous channel is formed in the second surface of the delivery member, and which is coupled in fluid flowing relation relative to a source of reactant material, and wherein the elongated substantially continuous channel delivers the reactant material onto the substrate.

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Patent Owner(s)

Patent OwnerAddress
ADVANCED MICRO-FABRICATION EQUIPMENT INC ASIAP O BOX 309GT UGLAND HOUSES SOUTH CHURCH STREET GEORGETOWN GRAND CAYMAN

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Frank P San Jose, CA 3 284
Fu, Li San Francisco, CA 62 881
Ho, Henry San Jose, CA 29 2887
Lv, Qing Shanghai, CN 8 734
Wang, Shulin Campbell, CA 41 3426

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