Probing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jul 12, 2007
app pub date -
Jan 9, 2007
filing date -
Jan 10, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A probing apparatus comprising: an inspection stage for receiving a flat plate-like device under test with a plurality of electrodes and moving the device under test on the inspection stage in at least three directions, that is, an X direction and a Y direction intersecting each other within a parallel plane to the device under test, and a Z direction intersecting both the directions; a probe card having a plurality of probes and spaced apart from the inspection stage in the Z direction such that the probe tips face the inspection stage; a displacement mechanism for relatively displacing the probe card and the inspection stage for adjustment of parallelism of the device under test on the inspection stage and the probe card; a plurality of measuring instruments respectively for measuring the interval between the inspection stage and the probe card and arranged at intervals in one of the inspection stage and the probe card in the X direction and the Y direction; a control portion for controlling at least the measuring instruments, the inspection stage and the displacement mechanism; and a memory portion for storing the measured interval by each measuring instrument.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully