Protecting Aperture for Charged Particle Emitter
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United States of America Patent
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N/A
Issued Date -
Jun 28, 2007
app pub date -
Oct 26, 2006
filing date -
Dec 13, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A charged particle beam apparatus and a method are provided. The apparatus comprises a charged particle emitter located within a gun chamber, the gun chamber being adapted to encompass a first pressure; at least one further vacuum chamber adapted to encompass a second pressure between one order and four orders of magnitude higher than the first pressure; a first aperture unit; comprising at least a first aperture opening and a molecule blocking area; a second aperture unit comprising a second aperture opening. Thereby, the first aperture unit and/or the second aperture unit is a differential pressure aperture separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude and the emitter, the molecule blocking area and the second aperture opening are positioned to be on a straight line.
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