Chamber with low electron stimulated desorption
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United States of America Patent
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Issued Date -
Jun 21, 2007
app pub date -
Sep 9, 2004
filing date -
Sep 12, 2003
priority date (Note) -
Abandoned
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Abstract
The present invention provides a charged particle emission component (100) for providing a charged particle beam (17) to a chamber of a charged particle beam column. The device comprises a gun chamber for housing the charged particle emission component; an emitter (16) for emitting a beam of charged particles; at least one beam shaping element (109; 18; 108; 402); and a residual gas diffusion barrier (106; 206) directly subsequent the emitter.
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