Projection lens
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Jun 14, 2007
app pub date -
Sep 19, 2003
filing date -
Sep 30, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In imaging optics with main optics having several optical elements, and in which the main optics are corrected for an observation radiation, there is further provided a transmissive, diffractive element, which is arranged and provided in the observation beam path of the imaging optics such that, due to the diffractive effect of the diffractive element, at least one aberration of the main optics is corrected for an inspection radiation having a different wavelength than that of the observation radiation.
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