NON-VOLATILE MEMORY
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United States of America Patent
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app pub date -
Jan 30, 2007
filing date -
Jun 7, 2005
priority date (Note) -
Abandoned
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Abstract
A NVM including a substrate, a control gate layer, a charge storage layer, a tunneling layer, a charge barrier layer, a gate dielectric layer and a first doping region is described. The control gate layer is disposed in a first trench of the substrate; the charge storage layer is disposed between the sidewall of the first trench and the control gate layer; the tunneling layer is disposed between the sidewall of the first trench and the charge storage layer; the charge barrier layer is disposed between the charge storage layer and the control gate layer; the gate dielectric layer is disposed between the bottom of the first trench and the control gate layer; and the first doping region is disposed in the substrate at one side of the control gate layer.
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