Method for making guide panel for vertical probe card in batch
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United States of America Patent
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Issued Date -
May 24, 2007
app pub date -
Aug 30, 2006
filing date -
Nov 21, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for making a guide panel for a vertical probe card in batch includes the steps of a) preparing a non-metal substrate, b) forming a shielding layer having a plurality of openings on the substrate, c) etching a part of the substrate corresponding to the openings of the shielding layer by an anisotropic etching so as to form bind holes with a predetermined depth on the substrate, d) grinding the substrate to open the blind holes by a back side thinning technology so as to form micro feed through holes on the substrate, and e) removing the shielding layer so as to obtain the desired guide panel.
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