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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
DOMTAR PAPER COMPANY LLC	100 KINGSLEY PARK DRIVE FORT MILL SC 29715

International Classification(s)

• D21H:PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED....

• 2006 Application Filing Year
• D21H Class
• 144 Applications Filed
• 71 Patents Issued To-Date
• 49.31 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Park, David W	Puyallup, WA	46	1063
# of filed Patents : 46 Total Citations : 1063

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Patent Citation Ranking

• 3 Citation Count
• D21H Class

• 5.19 % this patent is cited more than
• 18 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2017/0357,165

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

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Abstract

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A porous member is used in a liquid removal system of an immersion lithographic projection apparatus to smooth uneven flows. A pressure differential across the porous member may be maintained at below the bubble point of the porous member so that a single-phase liquid flow is obtained. Alternatively, the porous member may be used to reduce unevenness in a two-phase flow.

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Description

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