Probes of probe card and the method of making the same
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United States of America Patent
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Issued Date -
May 10, 2007
app pub date -
Aug 22, 2006
filing date -
Nov 10, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides probes of a probe card and the method of making the same, which is easier to control the size and hardness of each probe and provides the probes with well strength, hardness and electric property. The probe has a main member with a suspended arm, at least one conductive layer on the suspended arm and a dielectric layer between the conductive layer and the suspended arm. The conductive layer(s) is/are stacked on the suspended arm of the main member by electrocasting process and grinded to control the total thickness of the suspended arm.
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