Blister resistant optical coatings

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20070099001A1
SERIAL NO

11260929

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Abstract

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An optical coating and method for coating an optical element are disclosed. The optical element substrate may be made of fused silica and the coating may include a non-fluoride adherence layer such as SiO.sub.2 that is deposited on the substrate to overlay and contact a surface of the substrate. The coating may further include a multilayer system having at least one layer of a dielectric fluoride material, the multilayer system overlaying the non-fluoride adherence layer.

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Patent Owner(s)

Patent OwnerAddress
CYMER INC17075 THORNMINT COURT LEGAL DEPARTMENT MS/4-2C SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Melchior, John T San Diego, CA 14 443

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