Single crystalline a-plane nitride semiconductor wafer having orientation flat
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United States of America Patent
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Issued Date -
Apr 19, 2007
app pub date -
Oct 17, 2006
filing date -
Oct 19, 2005
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Abandoned
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Abstract
A single crystalline a-plane nitride semiconductor wafer includes one to three orientation flats in a crystalline direction, wherein a-plane ({11-20} plane) is formed as a main plane. Since plane orientation can easily be recognized, accuracy can be improved when a semiconductor device is formed on the nitride semiconductor wafer.
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