Micro-electro-mechanical pressure sensor
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United States of America Patent
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app pub date -
May 23, 2006
filing date -
Jan 15, 2003
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Abandoned
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Abstract
A pressure sensor is disclosed for measuring fluid pressure comprising a pressure sensing structure comprising a mass target suspended on a spring mechanism, wherein the mass target and the spring mechanism together exhibit high Q mechanical resonance, wherein the mass target has an area which is presented in a plane perpendicular to the direction of the mechanical oscillation of the structure, and further wherein the mass target and the spring mechanism are in the form of a membrane, and transducer means for measuring the fluid pressure by characterizing the effects that the fluid molecules produce on the motion of the structure.
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