Ferroelectric varactors suitable for capacitive shunt switching and wireless sensing

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United States of America Patent

SERIAL NO

11543654

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Abstract

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A ferroelectric varactor suitable for capacitive shunt switching is disclosed. High resistivity silicon with a SiO.sub.2 layer and a patterned metallic layer deposited on top is used as the substrate. A ferroelectric thin-film layer deposited on the substrate is used for the implementation of the varactor. A top metal electrode is deposited on the ferroelectric thin-film layer forming a CPW transmission line. By using the capacitance formed by the large area ground conductors in the top metal electrode and bottom metallic layer, a series connection of the ferroelectric varactor with the large capacitor defined by the ground conductors is created. The large capacitor acts as a short to ground, eliminating the need for vias. In one embodiment, the varactor shunt switch can be used as passive sensor with the capability of being wireless.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSITY OF DAYTON300 COLLEGE PARK BOULEVARD DAYTON OH 45469

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gevorgian, Spartak Gothenburg, SE 33 483
Subramanyam, Guru Dayton, OH 17 159
Vorobiev, Andre Gothenburg, SE 3 21

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