Pattern inspection apparatus, pattern inspection method, and inspection sample
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United States of America Patent
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Issued Date -
Mar 22, 2007
app pub date -
Jan 25, 2006
filing date -
Sep 22, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A pattern inspection apparatus for inspecting a pattern of a plurality of dies formed on an inspection sample, includes: a stream image memory device, which stores a stream image of the inspection sample; and a DD comparison unit which performs DD comparison, mutually comparing the pattern of each of the dies in the stream image.
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