Method and apparatus for producing metallic ultrafine particles
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United States of America Patent
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Issued Date -
Mar 22, 2007
app pub date -
Apr 11, 2006
filing date -
Sep 20, 2005
priority date (Note) -
Abandoned
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Abstract
An object of the present invention is to efficiently produce ultrafine particles having such a small diameter as 50 nm or less, a narrow range of size distribution, and a non-oxidation surface. According to the present invention, the metallic ultrafine particles are produced by dropping a raw metallic powder onto a controllably heated evaporating surface in a decompressed inert gas; instantly evaporating the raw metallic powder to form the ultrafine particle; and condensing and depositing the ultrafine particle on a trapping surface arranged above the evaporating surface. The raw metallic powder is any one of a single metal, an alloy and an intermetallic compound, preferably has an average particle diameter controlled to 500 .mu.m or smaller so that the powder can be instantly evaporated, and is preferably supplied by a minute amount.
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