Process for the acquisition of images from a probe with a light scanning electron microscope
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United States of America Patent
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Issued Date -
Mar 8, 2007
app pub date -
Oct 19, 2004
filing date -
Jul 16, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Process for the acquisition of images from a probe with a light scanning electron microscope, wherein detected image data that correspond to three dimensional probe regions are detected and stored to memory, wherein data compression ensues in that the data of images lying next to one another and over one another on the probe are taken into consideration during compression. A stack of images is advantageously recorded and images that are respectively adjacent in the image stack are consulted for the compression of data. Temporally and/or spectrally detected and stored data shall be consulted for the compression of data.
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