Image correcting apparatus, pattern inspection apparatus, and image correcting method, and reticle
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United States of America Patent
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Issued Date -
Mar 8, 2007
app pub date -
Dec 12, 2005
filing date -
Sep 8, 2005
priority date (Note) -
Abandoned
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Abstract
A method and apparatus for appropriately correcting a displacement or a distortion between an optical image and a reference image or both the optical image and the reference image by using characteristics of a pattern of an object to be inspected are disclosed. An image correcting apparatus includes an optical image acquisition unit which acquires an optical image of an object to be inspected, a reference image creation unit which forms a reference image from design data, an image correcting unit which performs arithmetic processing to a correction model parameter and the reference image to correct the reference image and to form a corrected reference image, and a correction model parameter identifying unit which uses feature data based on characteristics of a pattern of the image of the object to be inspected to calculate the correction model parameter for correcting a displacement or a distortion between the optical image and the reference image or both the displacement and the distortion.
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