Reference image forming apparatus, pattern inspection apparatus, and reference image forming method, and reticle
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United States of America Patent
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Issued Date -
Mar 8, 2007
app pub date -
Dec 12, 2005
filing date -
Sep 8, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and apparatus for forming an appropriate reference image in inspection of a pattern of an object to be inspected depending on characteristics of the pattern are disclosed. A reference image forming apparatus includes an optical image acquisition unit which acquires an optical image of an object to be inspected, a conversion parameter determining unit which uses feature data based on the characteristic of the pattern of the image of the object to be inspected to calculate a conversion parameter from the optical image and design data of the object to be inspected, and a reference image creation unit which performs arithmetic processing to the conversion parameter and the design data to form a reference image.
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