Cantilever and inspecting apparatus
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United States of America Patent
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Issued Date -
Mar 8, 2007
app pub date -
Aug 31, 2006
filing date -
Aug 31, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
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