PAD CONDITIONER FOR CONDITIONING A CMP PAD AND METHOD OF MAKING SUCH A PAD CONDITIONER
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United States of America Patent
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Issued Date -
Feb 15, 2007
app pub date -
Oct 21, 2005
filing date -
Aug 9, 2005
priority date (Note) -
Abandoned
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Abstract
The invention provides a pad conditioner for conditioning a CMP pad. The pad conditioner includes a substrate, a plurality of cavities on the substrate, a bonding agent filling in the cavities, and a plurality of abrasive particles securely placed and fixed in the cavities separately. The cavities are arranged in a regular manner and each cavity is sized such that it can accommodate only one abrasive particle. The cavities may be bowl-shaped or of other shapes. A method of making such a pad conditioner is also disclosed.
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