Vacuum chamber inlet device
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United States of America Patent
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Issued Date -
Feb 1, 2007
app pub date -
Jun 7, 2006
filing date -
Jul 29, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A vacuum chamber inlet device includes a gas providing element (10), a plurality of flow control element (20), and a plurality of gas input elements (30). The gas providing element has an inlet (11) and a plurality of outlets (12). The flow control elements are connected to the outlets of the gas input element. Each of the gas input elements has a first end (31) and a second end (32). The first end is connected to the flow control elements, and the second end is disposed in the vacuum chamber. A gas vent (33) is formed on the second end.
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