Field emitter arrangement and method of cleansing an emitting surface of a field emitter

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United States of America Patent

APP PUB NO 20070018562A1
SERIAL NO

11489979

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Abstract

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A field emitter arrangement and a method of cleaning an emitting surface of a field emitter are provided. The field emitter arrangement may include a field emitter tip having an emitting surface, wherein said field emitter tip is adapted to generate a primary beam of charged particles, and at least one electron source adapted to illuminate the emitting surface of the field emitter tip. The method of cleaning the emitting surface may include providing the field emitter having the emitting surface and at least one electron source adapted to illuminate the emitting surface and illuminating the emitting surface of the field emitter with a cleansing electron beam generated by the at least one electron source.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHGERMAN HIMES TWEETEN HEIMSTETTEN BAVARIA

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adamec, Pavel Haar, DE 53 1042
Zhou, Fang Pliening/Landsham, DE 47 739

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