Electrically controlled tiltable microstructures
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United States of America Patent
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Issued Date -
Jan 25, 2007
app pub date -
Jul 21, 2005
filing date -
Jul 21, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A support structure extends upwards from a substrate and supports a tiltable platform, the upper surface of which can be a mirror, by means of spaced flexible couplings that enable the platform to tilt relative to the support structure. Respective electrodes associated with the substrate and platform control the platform tilt in response to applied signals. The platform electrodes are preferably spaced below and tilt with the platform, with the platform extending laterally from the support structure further than the platform electrodes. The platform is preferably bulk micromachined, and the support structure surface micromachined.
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