Apparatus for and method of driving X-Y scanner in scanning probe microscope
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United States of America Patent
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Issued Date -
Jan 18, 2007
app pub date -
Jun 7, 2005
filing date -
Jun 7, 2005
priority date (Note) -
Abandoned
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Abstract
Disclosed is an apparatus for driving an X-Y scanner in a scanning probe microscope. The apparatus includes one or more position detector for detecting a moved-position of a mobile stage and generating a moved-position signal. Thee mobile stage is capable of holding a specimen and moving along at least one of x-axis and y-axis from a reference position. A controller is provided for generating a plurality of control signals based on the moved-position signal from the position detector, such that the mobile stage is moved along at least one of x-axis and y-axis by a certain desired quantity of distance. Also, a plurality of drivers is provided for moving the mobile stage along at least one of x-axis and y-axis, in response to the control signals from the controller.
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