Scanning capacitance microscope, method of driving the same, and recording medium storing program for implementing the method
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United States of America Patent
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Issued Date -
Jan 18, 2007
app pub date -
Feb 23, 2006
filing date -
Jul 12, 2005
priority date (Note) -
Abandoned
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Abstract
Provided are a scanning capacitance microscope, which can be very sensitive to a variation of capacitance between a tip and a sample and can make a clear and accurate measurement by preventing stray capacitance, a method of the scanning capacitance microscope, and a recording medium having embodied thereon a program for the method. The scanning capacitance microscope includes: a resonator including a probe having a cantilever and a tip attached to an end of the cantilever, the resonator resonating according to capacitance between the tip of the probe and a sample; an oscillator generating and applying a signal having a variable frequency to the resonator; and a detector detecting a signal generated by the resonator.
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