CONTINUOUSLY CLEANING OF THE EMISSION SURFACE OF A COLD FIELD EMISSION GUN USING UV OR LASER BEAMS

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United States of America Patent

APP PUB NO 20070001574A1
SERIAL NO

11426544

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Abstract

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A field emitter arrangement is provided, said field emitter arrangement comprising a field emitter tip having an emitting surface, and at least one light source adapted to illuminate the emitting surface of the field emitter tip. Furthermore, a method of cleaning an emitting surface of a field emitter tip is provided, the method comprising the steps of: providing a field emitter tip having an emitting surface and a light source and illuminating the emitting surface of the field emitter tip with the light source.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHGERMAN HIMES TWEETEN HEIMSTETTEN BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ADAMEC, PAVEL Haar, DE 53 1042
ZHOU, FANG Pliening/Landsham, DE 47 739

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