Vaporizer
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United States of America Patent
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Issued Date -
Jan 4, 2007
app pub date -
Sep 27, 2004
filing date -
Sep 26, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There is provided a vaporizer in which the path of a reaction tube can be kept long, and vaporization can be promoted evenly by radiation heat from a heater by agitating a carrier gas into which a source solution is dispersed in the direction crossing the passing direction of the gas, the agitation being made by a centrifugal force produced when the gas passes through the reaction tube. A carrier gas into which a source solution consisting of a liquid or powder is dispersed is supplied from the upstream side to a spiral reaction tube 103, and the carrier gas into which the source solution is dispersed and which passes through the reaction tube 103 is vaporized by radiation heat from a heater 104.
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